SHINWA Controls Co., Ltd.
Product Infomation
Device Department
Solenoid Valve
Motor Valve
Micro Valve
Peltier Cooling System
Equipment Department
Chiller Series
T&H Series
超高純度空気供給システム
SHINWA EXCELL
Plastic Products
Mold
Metallic Processed Products
LED
About SHINWA
Social Activity
Contact Us

SHINWA EXCELL

ISO Certification

TOP＞Product Infomation＞Equipment Department・CTH Series

Product Infomation　Equipment Department
CTH Series
  • Our CTH can make it realize that almost no contaminations exist in Clean Rooms.
    Contact us for contaminations you need to remove. We propose a suitable device.
  • Self-recovery function in the adsorbent system makes maintenance-free realize.
  • The initial performance will last, compared with systems with chemical filter.
  • Highly precise Temperature & Humidity controlling is available, combined with our T&H system.

■System features

Providing Velocity / blow
   5 to 100 m3 / min.
Principal Performance
   NH3 removal rate: 99.8%
Organic substance removal rate: 99.0%
NOX SOX removal rate: 90.0%
Temperature Ctrl. Tolerance
   ±0.1°C
International Safety Standards
   SEMI CE RoHS
Interface / communications   Any specification available
Remarks   With use-point controlling systems, highly precise controlling accuracy. Up to class 100, cleanness is available.