Shinwa develops the industry's first high-power chiller that uses natural refrigerant in the cooling circuit

Technological innovation in the semiconductor manufacturing process with the highest level of cooling capability

In collaboration with MAYEKAWA MFG. CO., LTD., Shinwa Controls has succeeded in developing a new precision liquid temperature controller (chiller) that is environmentally friendly and has the world's highest level of cooling capacity.

Product name: Oberon^TM

This product contributes to technological innovation across industries that require precise temperature control at deep cryogenic temperatures and high cooling capacities, including semiconductor manufacturing processes such as CIS (CMOS image sensor), 3D NAND, DRAM, and Logic.

Unique Features of Oberon^TM

1. EARTH-FRIENDLY
   Equipped with a refrigerator circuit which uses natural refrigerant (nitrogen), Oberon delivers cooling capacity of 9kW in the ultra-low temperature range of -70℃ by using Shinwa’s unique control technology (patent pending).

2. ENERGY SAVINGS

By using the reverse Brayton cycle using natural refrigerant and Shinwa’s unique control technology, significant energy savings of over 30% were achieved compared to conventional technology (vapor compression refrigerators).

3. SPACE SAVINGS

By optimizing the layout of internal devices, Oberon^TM is more compact compared to conventional natural refrigerant chillers (patent pending), which results in over 50% footprint reduction versus the competition.