Semiconductors
Semiconductor Device Manufacturing
Semiconductors are essential to our everyday devices, from smartphones and LCD TVs to home appliances and automobiles, and are indispensable in the sustained growth of key industries worldwide. Shinwa Controls has been a key player in precision products for the semiconductor industry for over five decades.
■Applications
- Heat removal during silicon wafer manufacturing process
- Temperature & humidity control for resist-coating and development processes
- Chemical (particles) and contaminant removal
- Heat removal during the etching process
- Temperature control of cleaning agent, mist removal
- Temperature control during wafer inspection, dicing, and final inspection
- Temperature control for LCD/FPD panel etching machinery
Optimum Solutions for the Semiconductor Industry
Ultra-low Temperature Chillers
Chillers achieve temperature control and cooling for semiconductor and LCD manufacturing equipment by cycling liquid coolant.
Combined Precision THC/Chiller
Industry-leading temperature and humidity control during the semiconductor manufacturing process.