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Chiller series

Our chillers and TCU products boast a record of proven, reliable performance in the semiconductor industry and beyond, and we custom-build each model according to our customers's needs and required specifications. Ask us about how we can support design and development of your equipments' internal heat exchange unit. 

System features

Temperature Range (Total, All Units: see each unit for details) -65℃ (cold channel) to +250℃ (hot channel)
Cooling power 500W to 100KW
Coolant (Brine) Fluorinert, Brine, Pure water
International safety standards SEMI, CE, and Rohs acceptable
Communications Every kind communications spec. available.
Others Perfectly separating heat exchanger (to prevent mixing the 1st-side coolant and the 2nd-side coolant.)

Product Line-ups

Temperature ctrl range
*-35℃ to +25℃
Type B
700(W)×610(D)×1695(H) (unit: mm)
Water-cooled refrigerator (R404A)
Temperature ctrl range
*-30℃ to +90℃
Type C
640(W)×980(D)×1640(H) (unit: mm)
Water-cooled refrigerator (R404A)
Temperature ctrl range
*-30℃ to +90℃
Type D
750(W)×848(D)×1600(H) (unit: mm)
Water-cooled refrigerator (R404A)