Chiller series

These are our chiller products that are mainly used in semiconductor manufacturing.
It achieves the precise temperature control required in manufacturing scenes.

Product Line-ups

Series	Titania® series
Channels	1CH / 2CH
Temperature Range	[CH-1]－20～＋80℃ [CH-2]＋30～＋100℃
Coolant	SF10,HFE-7500,HT200(CH-2 only)
Cooling Capacity	[CH-1]4.0kW@－10℃ [CH-2]3.5kW@35℃
Freon（GWP）	R448A(1387)
Power Supply Voltage	3-phase 200V

Series	Narvi® series
Channels	2CH
Temperature Range	[CH-1]－20～＋80℃ [CH-2]＋30～＋100℃
Coolant	SF-10,HFE-7500,FC-40(CH-2 only)
Cooling Capacity	[CH-1]4.5kW@－10℃ [CH-2]4.0kW@30℃
Freon（GWP）	R448A(1387)
Power Supply Voltage	3-phase 200V

Series	Dione® series
Channels	2CH / 3CH
Temperature Range	[CH-1]－45～＋40℃ [CH-2]＋10～＋70℃ [CH-3]＋40～＋90℃
Coolant	SF10,HT135,CF2
Cooling Capacity	[CH-1]6kW @-40℃，9kW @-20 to 40℃ [CH-2]9kW @10 to 70℃ [CH-3]3kW @40 to 90℃
Freon（GWP）	R32(675)
Power Supply Voltage	3-phase 400V

Series	Oberon ™ series
Channels	1CH
Temperature Range	[CH-1]-80～＋50℃
Coolant	Novec7200
Cooling Capacity	[CH-1]10kW @-70C, 8kW @-80C, 6kW@-100C
Freon（GWP）	N2(0)
Power Supply Voltage	3-phase 200V/400V