Chillers

Our chiller products, mainly used in semiconductor manufacturing, can the maintain precise temperature control required in a wide range of cutting-edge manufacturing processes.

Our Chiller Products

Series	Titania® series
Channels	1CH, 2CH
Temperature Range	[CH-1] -20～＋80℃ [CH-2] +30～＋100℃
Coolant	SF10, HFE-7500, HT200 (CH-2 only)
Cooling Capacity	[CH-1] 4.0kW@-10℃ [CH-2] 3.5kW@+35℃
Freon (GWP)	R448A (1387)
Power Supply Voltage	3-phase 200V

Series	Narvi® Series
Channels	2CH
Temperature Range	[CH-1] -20～+80℃ [CH-2] +30～+100℃
Coolant	SF10, HFE-7500, FC-40 (CH-2 only)
Cooling Capacity	[CH-1] 4.5kW@-10℃ [CH-2] 4.0kW@+30℃
Freon (GWP)	R448A (1387)
Power Supply Voltage	3-phase 200V

Series	Dione® Series
Channels	2CH, 3CH
Temperature Range	[CH-1] -45～+40℃ [CH-2] +10～+70℃ [CH-3] +40～+90℃
Coolant	SF10, HT135, CF2
Cooling Capacity	[CH-1] 6kW @-40℃，9kW @-20 to +40℃ [CH-2] 9kW @10 to +70℃ [CH-3 ]3kW @40 to +90℃
Freon (GWP)	R32 (675)
Power Supply Voltage	3-phase 400V

Series	Oberon ™ series
Channels	1CH
Temperature Range	[CH-1 ]-80～+50℃
Coolant	Novec7200
Cooling Capacity	[CH-1]10kW@-70C, 8kW@-80C, 6kW@-100C
Freon (GWP)	N2 (0)
Power Supply Voltage	3-phase 200V/400V