Chiller
Chiller series
Our chillers and TCU products boast a record of proven, reliable performance in the semiconductor industry and beyond, and we custom-build each model according to our customers's needs and required specifications. Ask us about how we can support design and development of your equipments' internal heat exchange unit.
System features
Temperature Range (Total, All Units: see each unit for details) | -65℃ (cold channel) to +250℃ (hot channel) |
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Cooling power | 500W to 100KW |
Coolant (Brine) | Fluorinert, Brine, Pure water |
International safety standards | SEMI, CE, and Rohs acceptable |
Communications | Every kind communications spec. available. |
Others | Perfectly separating heat exchanger (to prevent mixing the 1st-side coolant and the 2nd-side coolant.) |
Product Line-ups
Temperature ctrl range |
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*-35℃ to +25℃ |
Type B |
700(W)×610(D)×1695(H) (unit: mm) Water-cooled refrigerator (R404A) |
Temperature ctrl range |
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*-30℃ to +90℃ |
Type C |
640(W)×980(D)×1640(H) (unit: mm) Water-cooled refrigerator (R404A) |
Temperature ctrl range |
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*-30℃ to +90℃ |
Type D |
750(W)×848(D)×1600(H) (unit: mm) Water-cooled refrigerator (R404A) |