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Precise Air-Control

Precise Air-Control series

We make custom-order products to meet customer’s needs. Also, contact us for the air-flow analysis for your machinery inside. We offer our products with our business experience based on expertise seasoned.

System features

 Airflow supply cabality 1.0m3/min to 65m3/min
Temperature ctrl. range 2±0.1℃
Humidity ctrl range 40%RH to 50%RH
Humidity ctrl accuracy ±0.3%RH
International safety standards SEMI, CE, and Rohs acceptable
Communications Every kind communications spec. acceptable.
Others with use-point ctrl method make it highly precise accuracy.
For cleanness, cope with up to Class 100.

Product line-ups

Type A Airflow Supply
1.0m3/min to 3.6m3/min
440(W)×950(D)×800(H)
Water-cooled refrigerator (R-404a)
タタイプA供給風量
Type B Airflow Supply
3.7m3/min to 14.8m3/min
650(W)×950(D)×1493(H)
Water-cooled refrigerator (R-407c)
タイプB供給風量
Type C Airflow Supply
15.0m3/min~35.0m3/min
700(W)×950(D)×1720(H)
Water-cooled refrigerator (R-407c)
タイプC供給風量
Type D Airflow Supply
13.0m3/min to 65.0m3/min
990(W)×990(D)×2000(H)
Water-cooled refrigerator (R-407c)
タイプD供給風量