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Process Ambient Control

Process Ambient Control Series

With our extensive experience in providing custom process ambient control products, we are confident that we can propose a solution for your unique needs. We also conduct air flow analysis on your equipment; please contact us to schedule an appointment.

System Features

Supply air capacity 1.0m3/min~ 65m3/min
Temperature control range 20℃~27℃
Temperature control accuracy ±0.1℃
Humidity Control Range 40%RH~50%RH
International safety standards SEMI, CE, and Rohs
Communications Support is available for all communication specifications.
Others
High control accuracy is achieved with the use-point control method. 
Supports cleanliness up to Class 100.

Process Ambient Control Products

Type A Airflow Supply
1.0m3/min ~ 3.6m3/min
440(W)×950(D)×800(H)
Water-cooled refrigerator (R-404a)
タタイプA供給風量
Type B Airflow Supply
3.7m3/min ~ 14.8m3/min
650(W)×950(D)×1493(H)
Water-cooled refrigerator (R-407c)
タイプB供給風量
Type C Airflow Supply
15.0m3/min ~ 35.0m3/min
700(W)×950(D)×1720(H)
Water-cooled refrigerator (R-407c)
タイプC供給風量
Type D Airflow Supply
13.0m3/min ~ 65.0m3/min
990(W)×990(D)×2000(H)
Water-cooled refrigerator (R-407c)
タイプD供給風量