Process Ambient Control
Precision Air Conditioning Series / Precision Air Conditioning & Liquid Temperature Control Series
Our air and liquid temperature control products are primarily used in semiconductor and FPD manufacturing.
They deliver the precise temperature control required in manufacturing environments.
Product Development Track Record
| Series Name | T&H Control system |
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| Temperature control range | 20℃～27℃ |
| temperature stability | ±0.1℃ |
| Humidity control range | 40％RH～50％RH |
| Humidity control accuracy | ±0.3％RH |
| Types of fluorocarbons | R-407c |
| Supply voltage | 3-phase AC 200V–230V |
| External dimensions | 900(W)×1675(D)×2030(H)[mm] |
| Product Features | ・Compliant with standards such as SEMI, CE, and RoHS ・Supports various communication protocols ・Achieves high-precision control via a "use-point" control method ・Compatible with cleanroom environments up to Class 100 |
| Series Name | NAIAD300 |
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| Dimension | 1,200(W) × 1,380(D)× 2,380(H)[mm] |
| Cooling Cap | 300 kW |
| Air Flow | 25,000 CFM（83 CFM/kW） |
| Air temp | In：≦35℃ Out：58℃ |
| Coolant Fiow Rate | 1.5 LPM/kW（@450LPM,300kW） |
| Coolant Temp（PG25） | AALC In：60℃ AALC Out：50℃ |
| Approach temp | ≦8℃@220kW(VR200),≦13℃@275kW, ≦15℃@300kW |
| Redundancy | FAN N+1、Pump N+1 |
| Electrical specifications | AC415 V、50/60 Hz、125 A |
| Power consumption(CoP) | 38.6kW(5.8)VR200,40.kW(7.4) |
| PUE(1/CoP) | 1.175@VR200,1.135@cooling capacity 300kW |